VLSI fabrication principles :
by Ghandhi, Sorab Khushro,
Edition statement:2nd ed. Published by : Wiley, (New York :) Physical details: xxiv, 834 p. : ill. ; 25 cm. ISBN:0471580058 (alk. paper). Year: 1994Online resources:
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"A Wiley-Interscience publication."
Includes bibliographical references and index.
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