Semiconductor fabrication (Record no. 61467)
000 -LEADER | |
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fixed length control field | 00263nam a2200109Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 180804s9999 xx 000 0 und d |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.38GUS |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Dinesh C.Gupta |
245 #0 - TITLE STATEMENT | |
Title | Semiconductor fabrication |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc | Ann arbor |
Name of publisher, distributor, etc | ASTM |
Date of publication, distribution, etc | 1989 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Engineering |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Books |
No items available.