Brodie, Ivor.
The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray. - 1st Indian Reprint - New Delhi : Springer ; 2010. - xix, 650 p. : ill. ; 26 cm. - Microdevices .
Includes bibliographical references and indexes.
0306441462 978818494134
92028941
Microelectronics.
Thin-film circuits.
TK7874 / .B725 1992
621.381 / BRP
The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray. - 1st Indian Reprint - New Delhi : Springer ; 2010. - xix, 650 p. : ill. ; 26 cm. - Microdevices .
Includes bibliographical references and indexes.
0306441462 978818494134
92028941
Microelectronics.
Thin-film circuits.
TK7874 / .B725 1992
621.381 / BRP