May, Gary S.

Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze. - Wiley international ed. - New York : Wiley, c2004. - xiii, 305 p. : ill. ; 26 cm.

Includes bibliographical references and index.

0471232793

2003276248

GBA3-Y5182


Semiconductors--Design and construction.
Integrated circuits--Design and construction.

TK7871.85 / .M378 2004

621.3815/2