May, Gary S.
Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze. - Wiley international ed. - New York : Wiley, c2004. - xiii, 305 p. : ill. ; 26 cm.
Includes bibliographical references and index.
0471232793
2003276248
GBA3-Y5182
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
TK7871.85 / .M378 2004
621.3815/2
Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze. - Wiley international ed. - New York : Wiley, c2004. - xiii, 305 p. : ill. ; 26 cm.
Includes bibliographical references and index.
0471232793
2003276248
GBA3-Y5182
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
TK7871.85 / .M378 2004
621.3815/2